LOW-PRESSURE CHEMICAL VAPOR GROWTH APPARATUS,申请号JP19900282831-传众专利搜索

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发明名称	LOW-PRESSURE CHEMICAL VAPOR GROWTH APPARATUS
摘要
申请公布号	JPH04157715(A)	申请公布日期	1992.05.29
申请号	JP19900282831	申请日期	1990.10.19
申请人	NEC CORP	发明人	OKAMURA KENJI
分类号	H01L21/205;H01L21/285;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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