Measuring electroless plating deposition speed

摘要

The speed is measured using a sensor 1 having two opposed electrodes. A sensor drive circuit 2 cyclicly applies direct voltage 11 to the sensor and from the measured current polarization resistance is determined and input a processing circuit 3 which calculates the plating deposition speed, which is displayed at 4. In a preferred embodiment, each of the sensor electrodes has an conductor and a non-conductor, with either the conductors or the non-conductors facing each other. The conductors may be copper, gold, platinum or palladium and the non-conductors an alkaliproof non-conductive material such as epoxy resin or epoxy resin of a glass base material. Preferably the direct voltage 11 is 5-20mV with an on-off cycle between 1:1 and 1:10.