HAVING A PROTECTIVE FILM OF A POLYMER HAVING A FLUORINE-CONTAINING ALIPHATIC CYCLIC STRUCTURE,申请号US19900509144-传众专利搜索

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发明名称	HAVING A PROTECTIVE FILM OF A POLYMER HAVING A FLUORINE-CONTAINING ALIPHATIC CYCLIC STRUCTURE
摘要
申请公布号	US5117272(A)	申请公布日期	1992.05.26
申请号	US19900509144	申请日期	1990.04.16
申请人	ASAHI GLASS COMPANY LTD.;NMB SEMICONDUCTOR CO., LTD.	发明人	NOMURA, SHINZOU;KATSUSHIMA, HIROSHI;KAWASAKI, TORU;UNOKI, MASAO;NAKAMURA, MASARU
分类号	H01L21/312;C08F16/32;C08F20/52;C08F20/54;C09D129/00;C09D129/10;C09D133/02;C09D133/24;C09D147/00;H01L23/29;H01L23/31;H01L23/556	主分类号	H01L21/312
代理机构		代理人
主权项
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