| 摘要 |
<p>PURPOSE:To prevent glow discharge without deteriorating the vacuum degree of a vacuum container by communicating a feeder connected with a contact provided on a contact cover in an opening with the opening and providing a vacuum pipeline connected with the contact cover. CONSTITUTION:The coupler is provided with a contact cover 9, which has an opening 16, a contact 6 provided on the contact cover 9 through a contact pressing spring 7 in the opening 16, feeder 11 electrically connected with the contact 6 and a vacuum pipeline 10 connected with the contact cover 9 by communicating with the opening 16, and the feeder 11 is provided in the vacuum pipeline 10. When an exhaust system for a vacuum chuck is connected with the vacuum pipeline 10 for the vacuum chuck to exhaust air, a wafer 1 is sucked on the surface of a pallet 2, and when a certain time is passed, the vacuum degree in the opening 16 in the contact cover 9 and in the vacuum pipeline 10 for the vacuum chuck becomes higher than the vacuum degree which easily causes glow discharge. Then, a voltage to apply on an electrostatic chuck contact 5 is increased to the desired value and a vacuum container is started to be vacuum.</p> |
