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经营范围
发明名称
FILM FORMING PROCESS
摘要
申请公布号
EP0448781(A3)
申请公布日期
1992.05.20
申请号
EP19900120941
申请日期
1990.10.31
申请人
YAMATO KAKO KABUSHIKI KAISHA
发明人
NAKAMA, HIROSHI
分类号
C23C14/04;C23C14/06;C23C26/00;C23C28/00;C23C28/02;G03F7/11;(IPC1-7):G03F7/085;G03F7/09
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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