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发明名称
TREATMENT SYSTEM HAVING GATE DEVICE FOR DECOMPRESSION CHAMBER
摘要
申请公布号
EP0467356(A3)
申请公布日期
1992.05.20
申请号
EP19910112019
申请日期
1991.07.18
申请人
TOKYO ELECTRON LIMITED
发明人
KANEKO, SATOSHI
分类号
F16J13/22;F16K51/02;H01J37/18;H01L21/00;H01L21/02;H01L21/3065;(IPC1-7):H01L21/00
主分类号
F16J13/22
代理机构
代理人
主权项
地址
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