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摘要
申请公布号
JPH0456766(U)
申请公布日期
1992.05.15
申请号
JP19900097048U
申请日期
1990.09.14
申请人
发明人
分类号
C30B19/06;C30B29/36;H01L21/208;(IPC1-7):C30B19/06
主分类号
C30B19/06
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