| 摘要 |
A rotary motion transmitter with an electromagnetic feedthrough device for transmitting rotary motion from the outside to a vacuum chamber (10) designed for treating a specimen in a vacuum environment. The device comprises an evacuated and sealed rotor (14) which contains permanent magnets and, in turn, is hermetically sealed within a capsule (16). The interior of the capsule (16) communicates with the interior of the chamber (10). A removable stator winding unit (22) having electromagnetic windings which interact with the rotor (14) to transmit rotational motion to the rotor is fitted onto the capsule (16). The rotor (14) is rigidly connected to an output shaft (12) which extends into the sealed chamber (10) for supporting and positioning an object to be treated in vacuum. Thus the device combines in itself a rotary feedthrough for transmitting motion to the vacuum chamber (10) and an electric drive motor for positioning an object inside the chamber. This simplifies the construction, reduces its weight, makes it less expensive, protects it from contaminated exterior environments, etc. The transmitter also provides a method for baking the interior of the chamber to evaporate moisture components which are then removed by pumping. For this purpose, the removable stator winding unit (22) is removed and replaced by a cooling jacket (44). This allows baking without dismantling the rotor (14), since its permanent magnets are protected from thermal deterioration by cooling with the surrounding jacket (44).
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