| 摘要 |
PURPOSE:To offset correct the emission position of beam based on the sensing information by installing a sensing device for sensing strength of the beam or the strength distribution in the beam diameter direction. CONSTITUTION:A sensing device 10 for sensing the strength in the beam diameter direction of laser or a profile equivalent to power, energy or the like (more concretely, an area sensor such as CCD or MOS, PSD or a pickup tube or the like) is installed. The emission position of beam B exposed to light is offset corrected by controlling a beam scanner 5 by means of a shape control 6 based on the information obtained by said sensing device 10. As for parameters for controlling the beam scanner at the time of drawing, laser power and drawing speed are applied mainly, and if how the setting beam width is varied to the variation of the parameters can be estimated numerically, accurate offset value can be computed. The beam scanner 5 for condensing and emitting the beam B exposed to light to the liquid level of a liquid photosetting type resin material A is installed above a storage tank 2. |
