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发明名称
METHOD OF MANUFACTURING FIELD EFFECT TRANSISTORS
摘要
申请公布号
US5112766(A)
申请公布日期
1992.05.12
申请号
US19910730626
申请日期
1991.07.16
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
FUJII, TAKAYUKI;NAKATANI, MITSUNORI
分类号
H01L21/22;H01L21/338;H01L29/10;H01L29/417;H01L29/423;H01L29/812
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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