摘要 |
PURPOSE:To obtain the title sensor element enabling electrical resistance or electrostatic capacity to be changed according to humidity, by using, as the raw materials, multiple oxides of Sr, La and Sc. CONSTITUTION:As the raw materials for the objective humidity sensor, SrO, SrCO3 as Sr source, La2O3, La2CO3 as La source, and Sc2O3 as Sc source are used. From these raw materials, SrLaScO4 or SrLa2Sc2O7 is prepared. This multiple oxide is then formed to a specified shape followed by sintering into a form of a specified density. |