A RADIATION GAUGE,申请号EP19880301642-传众专利搜索

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发明名称	A RADIATION GAUGE
摘要
申请公布号	EP0283149(B1)	申请公布日期	1992.05.06
申请号	EP19880301642	申请日期	1988.02.25
申请人	CANON KABUSHIKI KAISHA	发明人	KADOSAWA, TSUNEAKI;KORENAGA, NOBUSHIGE
分类号	G01T7/00;A61B6/00;G01T1/00;G01T1/16;G01T1/17;G01T1/20;G01T1/29;G03F7/20;G21K1/04;G21K5/02;H01L21/027;H01L21/30;H05G1/26	主分类号	G01T7/00
代理机构		代理人
主权项
地址

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