FORMATION METHOD OF CONTACT HOLE,申请号JP19900253455-传众专利搜索

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发明名称	FORMATION METHOD OF CONTACT HOLE
摘要
申请公布号	JPH04132227(A)	申请公布日期	1992.05.06
申请号	JP19900253455	申请日期	1990.09.21
申请人	NIPPON STEEL CORP	发明人	EGUCHI KOHEI
分类号	H01L21/3205	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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