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发明名称
OPTICAL INSPECTING APPARATUS FOR MINUTE PATTERN
摘要
申请公布号
JPH04130208(A)
申请公布日期
1992.05.01
申请号
JP19900252244
申请日期
1990.09.21
申请人
BROTHER IND LTD
发明人
BESSHO YOSHINORI
分类号
G01B11/24;G01B11/245;G01N21/88;G01N21/93;G01N21/956
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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