Miniature electrostatic pump or flow velocity sensor - has active zone protected while remainder of semiconductor device is embedded in resin mass

摘要

The pump or sensor comprises a semiconductor device (2) with an active zone (3) lying transverse to the fluid flow. The active zone is protected while the remainder of the semiconductor device is encased in a resin mass by a shield which is subsequently removed. At least one connection for inserting the pump or sensor in a fluid line is formed at the same time as the semiconductor device is embedded in the resin mass. The semiconductor device may be embedded in the resin mass together with an associated electrical component. ADVANTAGE - Good protection against mechanical damage.