| 摘要 |
PURPOSE:To prevent attachment of contaminant to a vacuum container by mountably and demountably installing a transparent shielding member whose size is as large as one to cover at least a part of a transparent window at a position adjacent to the transparent window. CONSTITUTION:When a soft X-ray is generated, debris scatter from a target to attach to the inside of a vacuum container 2. However, the debris do not attach to a region of a transparent window 3 covered with a shielding plate 8 so that the transparency of that region does not drop. When a considerable quantity of debris attaches to the shielding plate 8, it is pulled out of the groove 43 of a supporting frame 42 and very much easily changed only by fitting a fresh shielding plate 8 into the groove 43 of the supporting frame 42. As a cylinder 40 is made up by covering the whole of the inside of the vacuum container 2, no debris attaches to not only the transparent window 3 but also the whole of the inside of the vacuum container 2. Moreover, with a double structure of the transparent window 3 and the shielding plate 8, it is possible to prevent a leak of soft X-ray from the position of window. |
