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经营范围
发明名称
VAPOR GROWTH EQUIPMENT
摘要
申请公布号
JPH04123421(A)
申请公布日期
1992.04.23
申请号
JP19900242504
申请日期
1990.09.14
申请人
TOSHIBA CORP
发明人
ISHIHATA AKIRA;SATO HIROSUKE;OMINE TOSHIMITSU
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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