METHOD OF DETERMINATION OF SEMICONDUCTOR CRYSTAL QUALITY,申请号SU19904780323-传众专利搜索

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发明名称	METHOD OF DETERMINATION OF SEMICONDUCTOR CRYSTAL QUALITY
摘要
申请公布号	SU1728901(A1)	申请公布日期	1992.04.23
申请号	SU19904780323	申请日期	1990.01.08
申请人	RIZHSKIJ POLT INSTITUT	发明人	DEKHTYAR YURIJ D,SU;SAGALOVICH GENNADIJ L,SU
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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