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发明名称
METHOD FOR MEASURING CAPACITANCE OF MIM TYPE CAPACITOR
摘要
申请公布号
JPH04121668(A)
申请公布日期
1992.04.22
申请号
JP19900243551
申请日期
1990.09.12
申请人
MITSUBISHI ELECTRIC CORP
发明人
MURASE ISAO
分类号
G01R27/26;H01L21/66;H01L21/822;H01L27/04
主分类号
G01R27/26
代理机构
代理人
主权项
地址
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