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发明名称
CARRIER DEVICE OF SEMICONDUCTOR WAFER CONTAINING CASSETTE
摘要
申请公布号
JPH04122044(A)
申请公布日期
1992.04.22
申请号
JP19900244500
申请日期
1990.09.13
申请人
MITSUBISHI ELECTRIC CORP
发明人
YASUTAKE SEIICHI
分类号
B65G54/02;B65G47/52;H01L21/677;H01L21/68
主分类号
B65G54/02
代理机构
代理人
主权项
地址
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