MEASURING PROCESS AND APPLIANCE FOR THE DIFFUSION LENGTH DETERMINATION OF MINORITY CHARGE CARRIERS FOR THE INTERFERENCE-FREE DETECTION OF DEFECTS AND POLLUTANTS IN SEMICONDUCTOR CRYSTAL BODIES,申请号EP19880107831-传众专利搜索

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发明名称	MEASURING PROCESS AND APPLIANCE FOR THE DIFFUSION LENGTH DETERMINATION OF MINORITY CHARGE CARRIERS FOR THE INTERFERENCE-FREE DETECTION OF DEFECTS AND POLLUTANTS IN SEMICONDUCTOR CRYSTAL BODIES
摘要
申请公布号	EP0295440(B1)	申请公布日期	1992.04.22
申请号	EP19880107831	申请日期	1988.05.16
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	FOELL, HELMUT, DR.;LEHMANN, VOLKER, DIPL.-ING.
分类号	G01N27/00;G01R31/265;H01L21/66	主分类号	G01N27/00
代理机构		代理人
主权项
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