| 摘要 |
A method for measuring an unknown parameter, such as a refractive index, absorption coefficient and film thickness of the uppermost layer of a multi-layered film formed on a substrate whose refractive index and absorption coefficient are known, the refractive index, absorption coefficient, and film thickness of the other layer or layers than the uppermost layer on the multi-layered film being known, and at least one of the refractive index n1, absorption coefficient k1 and film thickness d1 of the uppermost layer being unknown, includes the step of measuring the reflectances, the step of specifying the functions containing unknown parameters, and the step of numerically solving the equation.
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