| 摘要 |
PURPOSE:To stably obtain a large-diameter silicon carbide whisker by using a multicomponent catalyst as a combination of specified metals and metal silicides to form a product nucleus on a whisker forming substrate prior to the reaction. CONSTITUTION:A multicomponent catalyst with >=2 kinds of metals selected from a group (group A) consisting of group VIII metals and copper and >=1 kind of metal silicide selected from a group (group B) consisting of molybdenum disilicide, tungsten disilicide, niobium disilicide and titanium disilicide as the effective components is firstly deposited on a substrate in a reaction system as a catalyst, and then gaseous silicon sulfide is introduced to form a silicon- based nucleus. A gaseous hydrocarbon is then introduced and subjected to a reaction to convert the silicon-based nucleus into a silicon carbide nucleus, a silicon carbide whisker forming catalyst is additionally deposited, and then the hydrocarbonic compd. as a raw material and gaseous silicon sulfide are introduced and subjected to a reaction to grow a silicon carbide whisker with the silicon carbide nucleus as the product nucleus. |
