| 发明名称 |
PLASMA CVD DEVICE |
| 摘要 |
|
| 申请公布号 |
JPH04120277(A) |
申请公布日期 |
1992.04.21 |
| 申请号 |
JP19900239221 |
申请日期 |
1990.09.10 |
| 申请人 |
MITSUBISHI HEAVY IND LTD |
发明人 |
MURATA MASAYOSHI |
| 分类号 |
C23C16/50;H01L21/205 |
主分类号 |
C23C16/50 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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