| 摘要 |
PURPOSE:To scan the focus of a laser beam by using parabolic mirror for a condenser system and moving this mirror in parallel with the optical axis of the incident laser thereon. CONSTITUTION:A bender mirror 13 which reflects the incident laser beam, the parabolic mirror 14 which reflects the laser beam from the bender mirror 13 and condenses the same to a prescribed focal position, a parabolic mirror driving mechanism 7 which holds this mirror and drives the parabolic mirror in parallel with the incident laser beam on the parabolic mirror, and an actuator 8 which operates this mechanism are provided. The focus 5 of the laser light is scanned by moving the parabolic mirror 13 in parallel with the optical axis 2 of the incident laser light in this way. |
