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发明名称
FORMATION OF PROTECTIVE FILM OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH04116880(A)
申请公布日期
1992.04.17
申请号
JP19900234603
申请日期
1990.09.06
申请人
CANON INC
发明人
HASEGAWA MITSUTOSHI
分类号
H01L21/316;H01S5/00
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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