| 摘要 |
PURPOSE:To accurately position with linearity without vibration by correcting a voltage data table by the calculation of moving amount of a measured stage and a target moving amount. CONSTITUTION:An electronic controller 6 is so-called 'a microcomputer' composed of a CPU 7, a ROM 8, a RAM 9, and includes correcting means for correcting a voltage data table. The voltage data table stored previously is read, and a voltage is applied to a piezoelectric element 3. A stage 2 is moved by the piezoelectric effect of the element. The moving distance of the stage 2 at this time is measured by using displacement measuring means 4. Then, correcting means 6 is used to correct the table by the calculation of the moving amount of the stage and the target moving amount. A voltage data table of an accurately moving stage device which can accurately position by these operations can be newly formed. |
