| 摘要 |
PURPOSE:To achieve a simplified construction and a smaller size by forming an opposed pole comprising an inert material to an oxygen gas on the surface of a solid electrolyte, a part exposed to a gas to be inspected containing the oxygen gas being separated from a detection electrode. CONSTITUTION:A detection electrode 3 and an opposed pole 4 are formed on one side of a solid electrolyte 2 being separated from each other and a Pt wire 5 is connected to the electrodes 3 and 4. The electrolyte 2 employs a single crystal of LaF3, the electrode 3 employs Pt and the opposed pole 4 employs a material inert to an oxygen gas near a normal temperature, for example, Au, Ag or Sn. With such an arrangement, an electromotive force increases in proportion to an oxygen partial pressure in the detection gas. Thus, a product thus obtained can be used as oxygen gas sensor. The opposed pole 4 is formed by evaporation or sputtering of Au, Ag or Sn and the electrode 3 is formed by making a thin film of Pt on the surface of the LaF3 by evaporation or sputtering. |
