| 摘要 |
<p>PURPOSE:To produce this liquid crystal display device with an excellent yield and to stabilize displaying properties for a long period by setting the moisture content of a base for providing an active element at <= 0.5 wt.%. CONSTITUTION:ITO is deposited on a substrate 1, and by making it into a pattern a pixel electrode 2 is formed. Then, a MIM element using a hard carbon film as an active element is provided as follows. In other words, after Al is deposited on the pixel electrode of the substrate 1, to make the pattern is carried out, to form a lower part electrode 3. After the hard carbon film 4 is deposited as an insulating film on the lower electrode 3, the make it into the pattern. Further, after Ni is deposited on respective hard carbon insulating films, it is made into the pattern to form an upper part electrode 5. At this time, the moisture content of the base of the active element is set at <= 0.5 wt.%. Thus, the peeling of a film when it is formed is prevented, the yield is improved, and the properties of the active element are stabilized for the long period.</p> |
