SUBSTRATE TRANSFER METHOD

摘要

PURPOSE:To restrain an irregularity in control parameters by a method wherein the waiting time of a transfer means is set just before a single heat-treatment part or a plurality of heat treatment parts, the tact time at a cyclic movement is set, the tact time is set as the sum total or higher of the waiting time during which the transfer means makes a tour and the one-tour movement time and the tact time is set at the treatment time or higher at each heat treatment time including the waiting time at the heat treatment part. CONSTITUTION:The movement cycle at a cyclic movement is set in such a way that it is not changed at the transition period or the like of a lot. The start time of an HP1 treatment is delayed by t3 in such a way that the HP1 treatment is finished at the time when a robot is returned to a treatment part 41. Concretely, before a wafer to be subjected to the HP1 treatment from now is fed to the treatment part 41, the robot is on standby for t3 just before the treatment part 41.