摘要 |
<p>This invention is directed to the production of glass-ceramic materials especially designed for substrates in integrated circuit packaging. The glass-ceramics can be prepared from thermally crystallizable glasses that can be sintered into an integral glass-ceramic having a dielectric constant less than 6 and containing willemite as the predominant crystal phase. The overall composition of the glass-ceramic consists essentially, in weight percent of 15-45% ZnO, 10-30% Al2O3, and 30-55% SiO2. Where desired, a nucleating agent selected from the group consisting of 8-12% ZrO2 and 0.001-0.05% of a noble metal selected from the group consisting of Au, Pd, and Pt may be included.</p> |