发明名称 BEAM EXPANDER
摘要 PURPOSE:To hold the wave front of projection light completely in the same state at all times by interposing a single-mode channel type optical waveguide between two convex lenses which are arranged on the same optical axis so that both end surfaces are aligned with the focus positions of the respective convex lenses. CONSTITUTION:The single-mode channel type optical waveguide 5 is provided between the incidence-side convex lens 1 and emitting side convex lens 2 which are arranged on the same optical axis so that both the end surfaces 3 and 4 are aligned with the focus positions of the lenses l and 2. An incident laser beam 7 is guided by the lens 1 to its focus position, namely, from the end surface 3 into the optical waveguide 5, and emitted from the other end surface 4. The end surface 4 is at the focus position of the lens 2, so light after being transmitted through the lens 2 becomes a plane wave, whose wave front is invariably constant regardless of the wave front state of the beam 7. Thus, ideal beam cleaning becomes possible.
申请公布号 JPH04113303(A) 申请公布日期 1992.04.14
申请号 JP19900232936 申请日期 1990.09.03
申请人 NIKON CORP 发明人 OKI YASUSHI;IWASAKI JUN;FUKUDA MASASHI
分类号 G02B6/12;G02B27/00;G02B27/09 主分类号 G02B6/12
代理机构 代理人
主权项
地址