发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To enable write of a chip code for every one chip also in an entire reticle process by forming a plurality of fuses on a chip as a chip code when write of a chip code for showing each hysteresis is performed for each chip and by carrying out binary display by cutting a specified fuse. CONSTITUTION:At present, a laser fuse ROM is mounted on an IC memory using a redundant circuit, and a fuse is cut by a laser trimming device in a test process to make a good circuit by replacing a defective circuit with the redundant circuit. If write of a chip code is carried out in the laser trimming process, write of a chip code is possible for every one chip in any way. A chip code 6 carries out binary display by a fuse cut by scanning a laser passing through a center of the fuse and a fuse which is not cut. The fuse of the chip code has the same configuration, the same layer structure and the same material as a fuse ROM formed inside the chip. Since it is not necessary to connect the fuses electrically, they can be put outside an Al ring 3.</p>
申请公布号 JPH04111438(A) 申请公布日期 1992.04.13
申请号 JP19900231491 申请日期 1990.08.31
申请人 FUJITSU LTD 发明人 KAWASHIMA SHOICHIRO;YABU TAKASHI
分类号 H01L21/82;H01L21/02;H01L21/66;H01L23/58 主分类号 H01L21/82
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