| 摘要 |
<p>PURPOSE:To realize a mutual conversion between an electric signal and an optical signal at the inside of a semiconductor device by a method wherein one pair of electrodes are faced in a space part surrounded by an insulator. CONSTITUTION:One pair of electrodes 10 composed of end parts of a metal interconnection 4 are faced inside a space 6. An insulating film 9 is constituted of a first oxide film 2, a second oxide film 3 and a protective film 5. The figure shows characteristics by using curves A, B and C which refer to interelectrode distances of the electrodes 10 set at 0.7, 0.8 and 0.9mum, respectively, and current values against impressed voltages are plotted. Since discharge currents are controlled by the impressed voltages on the electrodes 10, the light-emitting intensity of an electric discharge in the space 6 can be controlled. When this electronic element is used and an input voltage is applied across terminals 42, 43 at a light-emitting part 41, the electronic element emits light. When the light is incident on a photodetection part 44, a voltage output across terminals 45, 46 is changed accordingly.</p> |
