| 摘要 |
<p>PURPOSE:To enhance the efficiency of an operation and to improve positional accuracy by sucking an aligning film which is set on a tray for setting the aligning film which can move in a horizontal direction on an aligning table and transferring it to the aligning table. CONSTITUTION:This device is provided with the aligning table 12, the tray 8 for setting the aligning film and an aligning film supporting table 4. Then, plural sensors for aligning 28 are provided, and the aligning film 6 having an aligning mark 32 at a position corresponding to the sensor for aligning 28 is positioned with a little gap to be in a non-contact state above a sticking base 10 previously set at a specified position on the aligning table 12 which can move in an X axis direction, a Y axis direction and a theta direction horizontally. Therefore, in the case of performing the alignment, the table 12 is freely moved. Thus, the fatigue of an operator and the dispersion of the aligning accuracy caused by an individual difference are eliminated.</p> |
