| 摘要 |
PURPOSE:To obtain the title thin film improved in reproducibility, operability and thin film uniformity by mixing the individual vaporized gases of the halides of the constituent elements for a high-temperature oxide superconductor composition followed by reaction on substrates. CONSTITUTION:Firstly, vaporization tubes 13-16 set up inside an inner reaction tube 12 provided inside an outer reaction tube 11 are charged with solid materials 17-20 for the halides of the constituent elements for a high-temperature oxide superconductor composition. Second, the solid materials 17-20 are heated and vaporized by resistance hot ovens 25-29 installed around the reaction tube 11 along with heating substrates 24 put on a tilted susceptor 23. Thence, a carrier gas is fed from a gas feeder 21 into the vaporization tubes 13-16, and the resulting vaporized gases are introduced into a mixing section 22 set up inside the reaction tube 12 to make a mixing, and the resulting mixed gas is then introduced into the reaction tube 11, where a reaction is made between said mixed gas and a reaction gas fed here, thus forming the objective oxide superconducting thin film on the substrates 24. |
