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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04105328(A)
申请公布日期
1992.04.07
申请号
JP19900223407
申请日期
1990.08.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
ONODA HIROSHI
分类号
H01L21/76;H01L21/336;H01L29/78
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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