Thermally stable pressure sensor - has deformable resistance element on membrane separated from substrate carrying short circuit element

摘要

A pressure sensor has a flat membrane (11) exposed to the pressure whose deformation acts on a deformable resistance element (12) whose resistance varies with the pressure. It also contains an evaluation circuit for pressure indication. A flat, flexurally stiff short circuit conductor element (13) is mounted opposite the deformable resistor element and on a flexurally stiff carrier substrate (14). The deformable resistance element is applied to the membrane. There is a distance ring (15) between the membrane and the substrate. USE/ADVANTAGE - Has thermally stable design.