| 摘要 |
<p>A transfer apparatus and method for transferring a wafer from one location to another in a controlled environment. The apparatus includes a movable member (108) for supporting a wafer thereon, which member (108) is operative for transferring the wafer from one location to another. The apparatus is characterized by environment control means (120) connected to the member (108) for maintaining the wafer in a controlled environment while transferring the wafer from one location to another independent of the environment surrounding the member (108). The environmental control means (120) in accordance with one embodiment includes a first shroud (124) overlying a portion of the member (108) to provide a chamber (136) for receiving the wafer, and a second shroud (128) overlying and spaced from the first shroud (124) to provide a passageway (132) therebetween. A first supply means (146, 150) is provided in communication with the chamber (136) for supplying a gas therein and a second supply means (138) is provided in communication with the passageway (132) for supplying a gas therein. <IMAGE></p> |
