Method of producing capacitive pressure sensors.

摘要

A method of producing a capacitive pressure sensor comprising the steps of:-
   forming at least one cavity in a sheet of semi-conductive material,
   bonding the sheet of semiconductive material to a non-conductive substrate, whereby at least one totally enclosed cavity is produced with the portion of the semconductive sheet forming one side of the cavity in use serving as a diaphragm, and
   removing part of said portion of the semiconductive sheet acting as a diaphragm from the side of the semiconductive sheet opposite to that which is bonded to the substrate so as to provide the diaphragm with a predetermined thickness appropriate to the required pressure range of the sensor, this step especially effected by lapping or grinding.