SEMICONDUCTOR WAFER HEATING DEVICE,申请号JP19900213675-传众专利搜索

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发明名称	SEMICONDUCTOR WAFER HEATING DEVICE
摘要
申请公布号	JPH0498784(A)	申请公布日期	1992.03.31
申请号	JP19900213675	申请日期	1990.08.14
申请人	NGK INSULATORS LTD	发明人	YAMADA NAOHITO
分类号	H05B3/20;C23C16/46;C23F4/00;H01L21/027;H01L21/205;H01L21/302;H01L21/3065;H05B3/74	主分类号	H05B3/20
代理机构		代理人
主权项
地址

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