| 摘要 |
PURPOSE:To make a print display of high quality with a handy type by obtaining a laser printer head which has a silicon electrostatic motor, a semiconductor laser, an optical modulating element, and a driving circuit on one silicon substrate. CONSTITUTION:A COMS driving circuit 601 is manufactured on the silicon substrate 101 first. On this silicon substrate, the silicon electrostatically driven motor (electrostatic motor) 201 is manufactured. This motor is the electrostatic motor, so good rotational controllability is obtained. The upper part of this motor is formed in a regular hexagonal and its wall surface is so machined that it can be used as a mirror. This laser printer is <=1mm thick or as thick as the substrate, and much more compact than before. This unit is incorporated in a laser printer which has a photosensitive drum of, for example, about 10cm and the extremely compact laser printer is manufactured. A high-quality print is realized and the resolution is, for example, 6090 dpi. |
