发明名称 MANUFACTURE OF HEATING TIP FOR TAB BONDER
摘要 PURPOSE:To enable a heating tip to be made without any tip deformation, even when subjecting it to high temperature processings such as covering with a diamond film and brazing, by performing first a surface treatment on the pressure face of the heating tip, and then, by machining the shape of the tip. CONSTITUTION:First, a tip material 3 is made into a plate having the thickness and shape of its pressure face to come its final shape. Then, a molybdenum plate 4 is bonded to the pressure face by brazing, and further, the molybdenum plate 4 is covered with a diamond film 5. Finally, by a general discharge machining, a heating tip 6 of the final shape is formed.
申请公布号 JPH0496340(A) 申请公布日期 1992.03.27
申请号 JP19900213673 申请日期 1990.08.14
申请人 FUJITSU LTD 发明人 KAWARADA MOTONOBU;KURIHARA KAZUAKI;SASAKI KENICHI
分类号 C23C16/00;C23C4/12;C23C16/26;C23C16/27;H01L21/60 主分类号 C23C16/00
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