| 摘要 |
PURPOSE:To make it possible to obtain the optimum mode during each processing time by providing an induction means formed with a dielectric capable of moving freely between a discharge tube and a discharge electrode and changing the distribution of the intensity of discharge generated in said discharge tube. CONSTITUTION:When high frequency AC voltage from a high frequency power source is applied between discharge electrodes 11a and 11b, a laser medium filled in a discharge tube 10 is excited, thereby generating laser oscillation between a total reflected mirror 14 and a partial reflected mirror 15, a part of which is output as laser light by way of the partial reflected mirror 15. When a dielectric 12 is between the discharge electrode 11 and the discharge tube 10, it is possible to equalize application voltage to unit discharge length added the discharge electrode even in the central part of the electrode to an electrode section so that uniform discharge may be available, thereby obtaining single mode as a result. When the dielectric 12 is not between the discharge electrode 11 and the discharge tube 10, the discharge will be concentrated to the end of the electrode, which results in lower dimensional mode available. |
