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发明名称
VAPOR-PHASE SYNTHESIS OF DIAMOND THIN FILM
摘要
申请公布号
JPH0492893(A)
申请公布日期
1992.03.25
申请号
JP19900207090
申请日期
1990.08.04
申请人
FUAIN SERAMITSUKUSU SENTAA
发明人
SHIBATA NORIYOSHI;MATSUDA TAKASHI
分类号
C30B29/04
主分类号
C30B29/04
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代理人
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