摘要 |
PURPOSE:To improve responsiveness, heat resistance and durability by vapor- depositing an electrochromic material (EC material) on a display pole forming substrate from many unspecific directions. CONSTITUTION:At the time of forming display parts 3 by vapor deposition of WO3, MO3, etc. on a transparent substrate 1 formed with a transparent conductive film 2, an EC material (WO3 or the like) is vapor-deposited at random on the substrate 1 from a vapor source 9 by changing the vapor deposition direction 10 inclinded by an angle theta of vapor deposition from the normal direction 11 of the substrate 1 to all directions up to + or -90 deg. in angle theta, while revolving and rotating a substrate 1, whereby the parts 3 are formed. By using this part, a white background plate 5 and electrolyte liquid 8 are sealed between this part and a substrate 7 formed with a counter electrode 4 by way of a spacer 6, whereby an EC display device is manufactured. In this way, the display device which is faster in response speed than that of a conventional perpendicular or diagonal vapor deposition method, is good in heat resistance and is less in degradation is obtained. |