发明名称 SEMICONDUCTOR ACCELERATION SENSOR
摘要 PURPOSE:To reduce possibility of causing excess strain in a sensor element by providing a pair of stoppers at near the tip of sensor element having a weight at the tip. CONSTITUTION:On both side directions of bending of a sensor element 1, a pair of stoppers 5, 6 are provided near the tip of the sensor element 1. The stopper 5 is a part of square block fixed on a base 4 and has a stopper surface 5a keeping a determined gap delta to the facing base 4 of the sensor element 1. And the other stopper 6 has a pair of legs projected in a direction approximately perpendicular to the square block at both ends of length direction of the block and is a part having the U-shape cross section. It is fixed on the stopper surface 5a of stopper 5 with the use of legs and the stopper surface 6a in between the both legs is facing to the surface of the sensor element 1 not facing to the base 4 keeping a determined gap delta. With this constitution, the bending of the sensor element 1 is limited even in the case excess acceleration works on a weight 3 due to an impact like fall, and the strain caused on a thin part 10 is remarkably reduced.
申请公布号 JPH0489576(A) 申请公布日期 1992.03.23
申请号 JP19900206263 申请日期 1990.08.01
申请人 MITSUBISHI ELECTRIC CORP 发明人 ARAKI TATSU
分类号 G01P15/12 主分类号 G01P15/12
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