PREPARATION METHOD OF A CERAMIC TOOL

摘要

The capillary tube ceramic tool for producing semiconductors is mnufactured by several steps, which are preparing alumina slip (2) and the external mold (3) having open pore made out of graphite powders and the wax core (4) as an internal mold, slip casting, pressing by the piston (7), drying, heating to remove the core at 150-400 deg.C, calcinating the high alumina body (Q) and simultaneously oxidating the mold in the oxygen atmosphere at 1100-1400 deg.C, and sintering the body at 1800-1900 deg.C.