| 摘要 |
PURPOSE:To economize space by dispersing and arranging monitor patterns checking semiconductor parameters to a plurality of positions in the four corners of a chip. CONSTITUTION:Functional pads 2 and monitor patterns 3-6 are disposed on a chip 1 for a semiconductor integrated circuit. Special spaces for arranging the monitor patterns are unnecessitated by dispersing and disposing the monitor patterns 3-6 at the four corners, to which the pads 2 are not arranged, of the chip 1. When the pads 2 are disposed while avoiding the four corners of the chip 1, spaces in size larger than the pads 2 can be ensured at the four corners of the chip. |
