发明名称 |
DEVICE FOR EVAPORATING MATERIAL BY MEANS OF A VACUUM ARC DISCHARGE AND PROCESS |
摘要 |
Deg. of ionisation of vapour produced for surface coating by vacuum arc discharge with consumable cold cathode and hot anode is controlled by preventing straight-line current flow between the operating surface (3a) of the material to be evaporated on the anode (14) by providing a movable wall (6) between them, having a window (6a) to ensure current flow between cathode and anode. ADVANTAGE - Adhesion of coating can be controlled. |
申请公布号 |
AU8291191(A) |
申请公布日期 |
1992.03.17 |
申请号 |
AU19910082911 |
申请日期 |
1991.08.01 |
申请人 |
PLASCO DR. EHRICH PLASMA-COATING GMBH |
发明人 |
HORST EHRICH;BRUNHILDE HASSE;MICHAEL MAUSBACH |
分类号 |
C23C14/32;H01J37/32 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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